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PAG Proceedings

2024

August Agenda – Joint User Group Meeting (CMPUG, PAG, & TFUG)
Evolving Trends in Advanced Packaging (3D integration, memory modules, AI, chiplets, on-shoring, etc.)
  • Improved CMP processes through architecture & design optimizations, Knut Gottfried, ErzM and Fraunhofer ENAS
  • Atmospheric Plasma Simplifies Die-to-Wafer Bonding, Daniel Pascual, ONTOS
  • Advanced X-Ray Imaging Technologies for Heterogeneous 3D IC Package Metrology and Inspection, Jeff Gelb, Sigray Inc.
  • Strategies for Probe to enable Advanced Packaging, Mike Slessor, FormFactor
  • Chemical Mechanical Planarization (CMP) for hybrid bonding, Swetha Barkam, Applied Materials (N/A)

2023

October Agenda – New Frontiers in the Future of Plasma Processing: Where We Are and What Lies Ahead

PAG Panelists: 

Richard A. Gottscho, Executive Vice President, Lam Research Corporation, USA
Vincent M. Donnelly, Professor, Dept. of Chemical and Biomolecular Engineering, University of Houston, USA
W.M.M. (Erwin) Kessels, Professor, Dept. of Applied Physics, Eindhoven University of Technology,
The Netherlands
Jianping Zhao, Technical Director, Tokyo Electron, USA

Video Recording: https://drive.google.com/file/d/1ZPzpksy5HDRinxDKM0-WBGC9y_2jh6xH/view

 

September Agenda – Packaging Beyond the Mainstream
(Joint User Group Meeting: CMPUG, PAG, TFUG)
  • Waferbonding and CMP – A Perfect Couple, Knut Gottfried, ErzM and Fraunhofer ENAS
  • Pt / HTCC Alumina based Electronic Packaging System and Integration Processes for High Temperature Harsh Environment Applications, Liangyu Chen, NASA
  • The CHIPS Act-related National Advanced Packaging Manufacturing Program, Scott Sikorski, IBM
  • Hybrid Multiscale Manufacturing Technologies for Heterogeneous Package Integration, P M Raj, Florida International University (not available)
  • A Review on CMP Challenges in HWB and Wafer Level Packaging, G. Bahar Basim, Intel

2022

June Agenda – Semiconductor Packagin Outside the Mainstream (Joint User Group Meeting: CMPUG, PAG, & TFUG)
  • Die-attach Materials Empowering Power Devices: Removing Heat and Supplying Power, Andy Mackie, Ph.D., Indium Corporation (not available)
  • Packaging Advances in the OSAT, Foundry, and MEMS Markets with a Highlight on Europe, Steffen Kroehnert, ESPAT Consulting
  • AIM Photonics Electronic-Photonic Technologies and Packaging outside the Mainstream, David Harame, Ph.D., SUNY Polytechnic, Colin McDonough, AIM Photonics
  • On-Shoring the Next Generation of Advanced Packaging, Charles Woychik, Ph.D., SkyWater Technology
  • Packaging Methods for Flexible Hybrid Electronics, Melissa Grupen-Shemansky, Ph.D., SEMI
  • Test and Measurement Challenges and Opportunities for Chiplet Heterogeneous Integration, Amy Leong, FormFactor
April Agenda – Plasma Applications for the Developement, Modification and Implementation of Carbon Allotropes
  • Plasma-functionalization of MWCNTs for Energy Storage, Conversion and Ttransport, Dr. Sylvain Coulombe, McGill University
  • New Opportunities for Plasma-based Approaches to Diamond Synthesis, Dr. Mohan Sankaran, University of Illinois, Urbana-Champaign (not available)
  • Approaches for the Modification of Macroscopic Carbon Nanotube Assemblies with Atmospheric-Pressure Plasma, Dr. Ruairi McGlynn, Ulster University
  • Graphene Transducer Manufacturing, Lonnie Wilson, GraphAudio (not available)
  • Electron Beam Generated Plasma as an Ultra-low Te Approach to Processing Graphene, Dr. Scott Walton, US Naval Research Laboratory (not available)

2021

April Agenda – Advances in CMP Consumables, Materials and Tools
  • Measuring Large Particle Contaminants in Cerium Oxide Chemical Mechanical Polishing,  (CMP) Slurries with Total Holographic Characterization, Laura A. Philips, Spheryx, Inc.
  • Slurry Injection System (SIS) Implementation in Dielectric and Metal CMP for III-V Semiconductors, John Zabasajja, HRL Laboratories
  • CMP Process Challenges for mmWave Si Technology, Hong Jin Kim, Global Foundries
  • Mixing and Handling Challenges with Next Generation Slurries, Carlo Aparece, Mega Fluid Systems and Marc Maxim, CMC Materials
  • Industry Standards: From Egyptian Royal Cubit to SEMI Guides for CMP Consumables, Alex Tregub, Intel
  • Effect of Process Variables on CMP Process Temperature, Catherine Bullock, Axus Technology (Pending)
  • A New Kinetic Removal Rate Model for Tungsten CMP, Ara Philipossian, Araca Inc. (Pending)
  • Preventing Cross Contamination with MIID (Malema™ Interconnect Interlock Device), Jay Rajagopalan, Malema Sensors
  • Effective Slurry Concentration Monitoring Using Refractive Index, Tracy Gast, Entegris
  • Nanoparticle Characterization Introduction: DLS, Diffraction, and NTA, Dr. Jeff Bodycomb, HORIBA Scientific
June Agenda – Novel Applications of Advanced Semiconductor Device Packaging Technology (Joint User Group Meeting: CMPUG, PAG, & TFUG
  • Higher Yield, Lower Cost Power Devices Through Plasma Dicing Process Integration, David Lishan, Ph.D., Plasma-Therm
  • Advanced Packaging for Superconducting Quantum Processors, Joseph Suttle, Ph.D., IBM Quantum (Not Available)
  • MEMS: Strategies for Codevelopment of the Electronics and the Package, Alissa Fitzgerald, Ph.D., A.M. Fitzgerald & Associates
  • Unique Electronic Device Packaging Solutions for Rugged Environments, Matt Francis, Ozark Integrated Circuits (Not Available)
  • Packaging of Micro- and Nano-Systems for Operation within Extreme Harsh Environments, Debbie Senesky, Professor, Stanford University (Not Available)
October Agenda – Advances in CMP Applications and Research
    • Bringing Value to the Customer with Big Data, Andrea Oehler, PhD, Fujimi Corporation
    • Exploiting Fluorescence for Enhanced Nanoparticle Tracking Analysis of CMP Slurries, Dr. Jeff Bodycomb and Carl Lundstedt, Horiba Scientific
    • Modulating Interfacial Reactions to Develop “Soft” p-CMP Processes, Abigail L. Dudek, Kiana A. Cahue, Tatiana R. Cahue, Mantas M. Miliauskas, and Jason J. Keleher, Lewis University
    • Advanced Point of Dispense Filtration for Recirculating Systems, Bradley Wood, Entegris
    • Applications of AI, Machine Learning and Big Data in Chemical Mechanical Polishing, Scott Lawing, Kinik North America
    • CMP Knowledge Foundry and Big Data Analytics, A. Philipossian, N. Monfared , Y. Sampurno, Araca, Inc., and J. J. Keleher, Lewis University

2020

February Agenda – NCCAVS User Group Joint Technical Symposium – The Quantum World
NCCAVS 2020 Poster Session – Results
  • Modeling Systems with Quantum Computers, Rudy J. Wojtecki, IBM Research – Almaden (N/A)
  • Optimizing Quantum Optimization Algorithms for Noisy Quantum Computers, Davide Venturelli, USRA Research Institute for Advanced Computer Science (Pending)
  • Enterprise Software to accelerate the quantum revolution, Christopher T. Brown, Zapata Computing, Inc.
  • Materials Engineering for Quantum Information Technology, Robert Jan Visser, Applied Materials (Pending)
  • Introduction of a new technology platform to enable scalable fabrication of single silicon vacancy defect arrays, Andre Linden, Raith America, Inc.
  • Thin Film Fabrication of Quantum Upconverting Sensors for Dark Matter Detection, Dale Li, SLAC National Accelerator Lab
  • Quantum Measurement Protocols for Upconverting Sensors, Stephen Kuenstner, Stanford University
  • Superconducting quantum coherent circuits: introduction, challenges, and near-term applications, John Mark Kreikebaum, Lawrence Berkeley National Laboratory & University of California, Berkeley
April Agenda – Advances in CMP Consumables, Materials and Tools
  • Membrane Carrier Tuning for State of the Art CMP Process Development in R&D Environments, Knut Gottfried, Fraunhofer ENAS
  • Holistic Approach to the Understanding CMP-Induced Defects, Hong Jin Kim, Global Foundries
  • CMP – A Leap Forward; Capstone, Catherine Bullock, Axus Technology
  • No Process Can Change Alone: An Integrated Approach to CMP Consumable Development and Manufacturing, Stephen Bottiglieri, Saint Gobain Abrasives
  • Characterization of Large Particle Contaminants in CMP Slurries using Holographic Video Microscopy, Laura Philips, Spheryx, Inc. (Pending)
  • Case Studies Involving the Use of a 300-mm Brush Scrubber and Tribometer to: (A) Evaluate the Role of Anionic Supramolecular Assemblies in Post-STI-CMP Cleaning, and (B) Determine the Effect of Brush Nodule Placement Density on Shear Force in Time and Frequency Domains in Post-W-CMP Cleaning, Ara Philipossian, Araca Inc.
June Agenda – Advanced Packaging Technology
  • Plasma Dicing – The “Next Normal” Richard Barnett, Senior Product Manager, Etch Products (SPTS Technologies Ltd, Newport, UK)
  • Heterogeneous Integration Roadmap and the Revolution Enabling Future Progress, Dr. Wilmer R. Bottoms, Chairman, Third Millennium Test Solutions
  • Surviving the Heat Wave – A presentation on thermally induced failures and reliability risks created by advancements in electronics technologies…and How Modeling Early in the Design Process can Identify these Issues, Greg Caswell, ANSYS
  • Heterogeneous Integration Competence Center – An Open Access Innovation Incubator, Garrett Oakes, EV Group (Pending)
  • Solving the DataCenter Energy Crisis with Silicon Photonics and Overcoming Photonics Wafer-level Test Challenges, Dr. Choon Beng Sia, FormFactor
September Agenda – Advancements in CMP Applications and Research
    • Ultra-rapid Bulk Polishing of 150mm Silicon Carbide Substrate with Single-wafer Chemical Mechanical Planarization (CMP), Donshan (Sean) Yu, Applied Materials (N/A)
    • Computational modeling of CMP pads: a die-scale model incorporating measured surface roughness, Brian Salazar, University of California, Berkeley
    • Enhanced Melt-blown Filtration For Next Generation CMP Slurries and Applications, Patrick Connor, Pall
    • Surface and Electrochemical Evaluations for Barrier and Packaging level CMP Optimization, G Bahar Basim, University of Florida
    • Copper Removal at Short Time with Implications for Polishing Mechanisms, Len Borucki, Araca
    • CMP defects: Influence of CMP slurry, handling and delivery, Rahul Trivedi, GlobalFoundries
    • CMP Pad Conditioning and Applications to Soft Pads, Scott Lawing, Kinik
    • Effective Slurry Mixing and Handling and its Impact on CMP Slurry Particle Health, Carlo Aparece, Mega Fluids Systems
    • Correlation between dishing/erosion and electrical properties in copper interconnects after chemical mechanical planarization, Shirley Lin, Versum Materials
    • Correlating Shear Force and CoF to Platen Motor Current in Copper, Cobalt, Tungsten, STI and ILD CMP at Non-steady-state and Steady-state Conditions, Ara Philipossian, University of Arizona

2019

February Agenda-NCCAVS Users Group Joint Technical Symposium
  • Next Generation Energy Storage Technologies, Subramanya (Subra) Herle, Applied Materials
  • Solid-state Thin Film Batteries Take a Page Out of the 3D Transistor Play Books, J.R. Gaines, Kurt J. Lesker Company
  • Advances and Challenges with Rechargeable Lithium-Air Batteries, Dave Sopchak, Coulombic, Inc.
  • Peak Power Impact on Battery Cycle Life, Naoki Matsumura, Intel
  • Directly Converting Heat to Electricity using Compact, Microfabricated Thermionic Devices, Jared Schwede, Spark Thermionics (N/A)
  • AlN-based Piezoelectric Energy Harvesting, Mary Ann Maher, SoftMEMS (N/A)
  • Tribute to John W. Coburn, David Graves, U.C. Berkeley
  • How to Make Manufacturing of LEDs Truly Green, Prasad N. Gadgil, Atomic Precision Systems
  • GaN HEMT Electronics for Extreme Environments, Saleh Kargarrazi, Stanford XLab
  • Conversion Technologies for Generating, Transmitting, and Storing Energy, Joint Users Group Technical Symposium
  • Selection of Battery and Charging Algorithm to Extend Battery and Cycle Life, Naoki Matsumura
April Agenda-Advances in CMP Consumables, Materials and Tools
  • Keynote Talk, Suresh Ramarajan, Senior Director NVM Process Development Engineering, Micron Technology (Not Available)
  • Method for Studying the Effect of Conditioner Design and Polisher Kinematics on Fluid Flow Characteristics during CMP, Juan Cristobal Mariscal, University of Arizona
  • Low Particle Size Ceria STI Slurry Designed for High Performance Dishing and Nitride Loss, Edmund Chu, Ferro
  • The Development of Post-CMP Cleans to Address New Challenges in Advanced Device Manufacturing, Paul Bernatis, DuPont EKC Technology (Not Available)
  • Effect of Conditioner Wear on the Tribological, Thermal, Kinetic and Pad Microtextural Characteristics in ILD CMP, Hossein Dadashazar, University of Arizona
  • Computer Simulation for Understanding of CMP Process, Akira Endou, Fujimi Incorporated
  • High Quality Test Wafer and Analysis For CMP Process, Consumables and Materials, Yasuji Moriki, AMT
  • Okamoto 300mm Final Polish System, Bob Pinto, Okamoto

2018

February Agenda-NCCAVS Joint Users Group Technical Symposium: Process, Materials, and Technology Innovation for Smart Devices, Displays, and Internet of Things
  • Reliability for the 21st Century: Meeting Challenges of New Technologies and New Markets, (Plenary Talk) Milena Vujosevic
  • Development and R2R Scale up of a Hybrid Printed CMOS Silicon TFT Process, Patricia Beck, Thin Film Electronics
  • Tool Design Considerations for Advanced Atomic Layer Deposition, Duane Bingaman, Kurt J. Lesker Company
  • Electron Heating in Sputtering Magnetrons, Andre Anders, LBNL, Leibniz Institute of Surface Engineering
  • Plasma-based Thin Film Depositions: Applications, Limitations, Our Improvements, and Case Studies in Battery, Photovoltaic, Non-volatile Memory, and Medical Devices Applications, George Guo, Ascentool Inc.
  • Can a New Materials Innovation in Thin Film Optical Applications be Faster and Cheaper?, Guowen Ding, Labforinvention Corp.
  • A Quantitative Approach to Optical Emission Spectroscopy, Frank Papa, Gencoa
  • Thin Film Roadmap for Solid State Li Metal Batteries, Ernest Demaray, Demaray LLC
  • Solid-state Thin Film Batteries in 3D, J.R. Gaines, Jr., Kurt J. Lesker Company
April Agenda-Advances in CMP Consumables, Materials, and Tools
  • Outlook for CMP Consumables, Mike Corbett, Linx Consulting
  • Recent Trend of CMP Equipment Platform and its Requirement of Process and Consumables: BEOL CMP, Sunghoon Lee, GlobalFoundries
  • Particle Developments as an Enabler of Next Generation Ceria Slurries, Nate Urban, Ferro
  • Almost Complete Removal of sub-90nm Ceria Particles from Silicon Dioxide Surfaces, Jihoon Seo, Clarkson University
  • Studying Effects of Surfactants on CMP Slurries with Holographic Characterization, Laura Philips, Spheryx Inc.
  • Reduced Cost of Ownership Oxide CMP Process using 300mm Consumables for 200mm Processing, Christopher Eric Brannon, Texas Instruments
  • 3D Trajectories, Diffusion, and Interaction Energies of Ceria Particles on Glass Surfaces, Akshay Gowda, Clarkson University
  • High Efficiency Post-CMP Cleans for Advanced FEOL and MOL Applications, Paul Bernatis, Dupont-EKC Technology (pdf N/A)
  • Tuning Wear Rate and Surface Finish of CMP Pads via Precise Control of Pad Conditioner Features, Matthew Fritz, 3M Company
  • Tribocorrosion Mechanism for Tungsten Void in CMP in-situ Cleaning, Hong Jin Kim, Global Foundries
  • Assay Characterization of Industrial CMP Slurries Based on Densitometry, Refractive Index and Dynamic Light Scattering, Leticia Vázquez Bengochea, University of Arizona
  • Advanced Cu CMP Slurries for Advances Node Cu CMP Applications, Tom Shi, Versum Materials
  • Cobalt Buff Step CMP for Middle of the Line Applications and Reduction in Slurry Consumption Using a Novel Slurry Injection System, Calliandra Stuffle, University of Arizona
June Agenda-Joint User Group (CMP, PAG, & TFUG) Meeting: Advanced Packaging Technology
  • Monolithic Integration of GaN Sensors and Electronics for Harsh Environments, Dr. Caitlin Chapin, XLab (Not Available)
  • Equipment and Process Challenges for the Advanced Packaging Landscape, Laura Rothman Mauer, Veeco Instruments, Inc.
  • Heterogeneous Integration Needs Heterogeneous Package Assembly, Annette Teng, Promex Industries
  • Fan-out IC Packaging Trends and the Impact on Equipment Capital Structures (e.g., Wafer Processing Versus Traditional PCB Styles) Today and in the Future, Jon Woodyard, SiPAQ, LLC
  • Low temperature, low damage plasma technologies for advanced packaging applications, David Lishan, Plasma-Therm, Inc.
  • CMP and Current Trends Related to Advanced Packaging, Robert L. Rhoades, Ph.D., Entrepix
July Agenda-CMP Technology and Market Trends
  • Global Manufacturing Update – Opportunities and Pitfalls for Manufacturers in 2nd half of 2018 and beyond, Len Jelinek, IHS Insights
  • Next Gen CMP Challenges for 3D Memory Architectures, Sai Vegunta, Micron
  • Investigation of NMR-based Surface Area Measurement as a Quality Monitor for Nanoparticle Silica Abrasives, Olga Samsonenka, Andy Kim, University of Washington
  • New Insights into the Tribological and Kinetic Attributes of Retaining Rings in Chemical Mechanical Planarization, Gabriela Diaz a, Lauren Peckler a, Yasa Sampurno a,b , Ara Philipossian a,b, a University of Arizona, b Araca Incorporated
  • Molecular Design of CMP Consumables for Advanced (<10nm) Processing Technologies, Michael E. Mills, DOW Electronic Materials
  • New Paradigms in CMP Consumables, Rajeev Bajaj, Applied Materials
  • Developing Robust Quality Systems for CMP Solid Consumables, Alex Tregub, Intel
  • Impact of Advanced Memory Technologies on CMP Industry, Mike Corbett, Linx Consulting
  • Formulated Products for W CMP, Chun Lu, Versum Materials

2017

February Agenda-NCCAVS Joint Users Group Technical Symposium: Novel Materials, Processes, and Devices for Future Generation Electronics
  • Mechanisms of Plasma Therapy (Plenary Talk), David Graves, UC Berkeley
  • Large-Scale, Thin-Film Battery, Ernest Demaray, Demaray LLC
  • Inkjet Printing for Manufacturing of Flexible and Large-Size OLEDs, Jeff Hebb, Kateeva
  • Rapid Materials and Device Innovation for Non-Volatile Memory Applications, Larry Chen, Intermolecular
  • BEOL Interconnect Innovations for Improving Performance, Paul Besser, Lam Research
  • Nanoscale Chemical Imaging & Topography with Photo-induced Force Microscopy, Thomas R. Albrecht, Molecular Vista, Inc.
  • Material Innovation for Non-Volatile Memory Selectors, Larry Chen, Mark Clark, Charlene Chen, Milind Weling, Intermolecular
September Agenda: Advances in Atomic Layer Deposition (ALD)
  • Use of Plasmas in Atomic Layer Deposition Processes, Mark J. Sowa, Veeco – CNT
  • Atomic Layer Deposition of Ferroelectric and Threshold Switching Materials for Next Generation Nonvolatile Memory, Karl Littau, Intermolecular Inc.
  • Dopant-Rich Films on Si: A New Frontier For Thermal ALD Processes, Michael I. Current, Current Scientific
  • Atomic Layer Deposition with Activated Species: Applications in Gallium Nitride Power Devices and Silicon-Based Artificial Photosynthesis, Professor Paul C. McIntyre, Department of Materials Science and Engineering, Stanford University (presentation N/A)
November Agenda: Patent Strategy and Mechanics, and What Comes Afterward
    • Nuts and Bolts of Getting a Patent, Dan Flamm, Microtechnology Law & Analysis
    • Alice in Wonderland Patentland, Richard T. Ogawa, Ogawa, P.C.
    • Developing an International Patent Portfolio, Will Chen, Sheppard Mullin Richter & Hampton LLP
    • Monetizing Your Patent Assets: Turning Paper into Gold, Duane Mathiowetz, Foley & Lardner, LLP

2016

February Agenda – Materials, Devices, and Systems for Intelligent Engineering Solutions
  • NCCAVS Joint User Group Symposium Abstract Book and Exhibit Guide

2015

February Agenda – Technology Innovation for Next Generation Materials and Manufacturing
  • Message from Indium Corporation, Jacques Matteau, Indium Corporation
  • Low Emissivity (Low-E) Coating Technologies for Energy Saving Window Applications, Guowen Ding, Intermolecular
  • 40 Years of Magnetron Sputtering: Still an Exciting Field for Discovery, Andre Anders, Lawrence Berkeley National Laboratory
  • New Applications of Chemical Mechanical Polishing, Rob Rhoades, Entrepix, Inc.
May Agenda – Atmospheric Plasmas and Applications
  • Atmospheric Plasma Applications in Electronic Packaging, Demetris Chrysostomou, PVA Tepla America
  • Plasma CVD passivation; Key to high efficiency silicon solar cells, David Tanner, GT Advanced Technologies
June Agenda– 3D Packaging
  • Electromigration Simulation Flow For Chip-Scale Parametric Failure Analysis, Jun-Ho Choy, Mentor Graphics Corp.
September Agenda– Semiconductor Technology Beyond 7nm
  • Carbon-based Materials for Flexible Electronics, Nan Liu; Zhenan Bao, Stanford University
  • Zeiss Process Gas Analyzer based on Ion Trap Technology, Outstanding Performances as In-line, Real Time Gas Analyzer, Michel Aliman, Hin Yiu Anthony Chung , Martin Antoni, Gennady Fedosenko, Alexander Laue, Rüdiger Reuter, Valerie Derpmann, Leonid Gorkhover, Andreas Gorus, Andreas Pecher Carl Zeiss SMT GmbH, Rudolf-Eber-Str. 22, 73447 Oberkochen, Germany
  • Energy-efficient Design for Emerging NVM Technology: Enabled by Carbon Nano-materials, Ethan C. Ahn, Ph.D., Department of Electrical Engineering, Stanford Nanoelectronics Lab., Stanford University
  • Limitations and Challenges to Meet Moore’s Law, Sung Kim, Sr. Director of Maydan Technology Center; Advanced Products Technology Development, Applied Materials
  • Sub-5 nm Patterning and Applications by Nanoimprint Lithography and Helium Ion Beam Lithography, Yuanrui Li, Ahmed Abbas, Yuhan Yao, Yifei Wang, Wen-Di Li, Chongwu Zhou, and Wei Wu

2014

February – Nanomaterials for Energy, Biomedical, and Electronic Devices
  • Biomedical Devices: Engineering’s Contributions to Improving Quality of Life, Guna Selveduray, San Jose State University
  • Metal-Carbon Nanotube Contacts, Patrick Wilhite and Cary Yang, Santa Clara University
  • Efficient Electromagnetic and Multiphysics Simulation – from Nanomaterials to Macro Devices, Mike Hook, Cobham Technical Services
  • Controlled Nanoparticle Generation by Terminated Cluster Growth in a Sputtering Chamber, Andre Anders and Cesar Clavero, Lawrence Berkeley National Laboratory
  • Implement Smell and Taste with Nano-sensor, Zhiyong Li, HP Labs
June – 3D Packaging
  • Monolithic 3D is now Practical, Zvi Or-Bach, MonolithIC 3D Inc.
  • TCAD Modeling for Mechanical Stress Management in 3D IC Packages, Xiaopeng Xu, TCAD R&D, Synopsys, Inc.
September Agenda– Semiconductor Technology Beyond 7nm
  • Material Challenges for EUV, Patrick Naulleau, Lawrence Berkeley National Laboratory
  • Tuning the threshold voltage of carbon nanotube transistors for flexible, CMOS circuit, Evan Wang, PhD, Department of Materials Science and Engineering at Stanford University
  • Low-Power Resistive Memory with 1D and 2D Electrodes, Feng Xiong, Ph.D. Stanford Pop Lab (EE) and Cui Lab (MSE)
  • Carbon Nanotube Vias for End-of-Roadmap On-chip Interconnects, Cary Y. Yang, Professor, Electrical Engineering Department, Center for Nanostructures, Santa Clara University
  • Advantages and Challenges of FinFET Devices and Technologies, Jack C. Lee, Professor of the Electrical and Computer Engineering Department, The University of Texas at Austin
  • Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias, Changjian Zhou, Mansun Chan (Hong Kong University of Science and Technology); Anshul Vyas, Patrick Wilhite , Cary Y. Yang (Santa Clara University); Phillip Wang (Applied Materials)
November Agenda– Medical Applications of Plasma Processing
  • Non-Thermal Plasmas for Biomedicine: A New Frontier in Plasma Processing, David B Graves, University of California Berkeley, Department of Chemical Engineering
  • Investigating the Interface Between Plasmas and Aqueous Solutions, Alex Lindsay, North Carolina State University, Department of Nuclear Engineering

2013

February Agenda – Technology for Clean Energy
  • Challenges and Solutions for More Sustainable Energy Systems, Stacey F. Bent, Stanford University
  • Novel Plasmonic Materials for Energy-Related Devices, César Clavero, Ph.D., Lawrence Berkeley National Laboratory
  • Process Development for Advanced Generation Crystalline Silicon Solar Cells, James Gee, Applied Materials
  • Depth Profiling of Organic Photovoltaic and OLED Materials by Cluster Ion Beams, J.S. Hammond1, S. N. Raman1, S. Alnabulsi1, N. C. Erickson2 and R. J. Holmes2; 1Physical Electronics, 2University of Minnesota
  • Thermoelectrics (TE) at the Nanometer and Sun to Fiber (S2F) at the Micrometer, Nobuhiko “Nobby” Kobayashi, University of Santa Cruz
  • Measurement of CdTe Ratio for Composition Control, Gary Mount, Larry Wang and Wesley Nieveen, Evans Analytical Group, 
  • Sunny Future for the Solar Industry, KRS Murthy, I3 Solar
  • Nanostructured Energy Conversion for Low‐power Energy Harvesting Devices and Beyond for High-power ‘Sun‐to‐fiber’ Solar Devices, Michael Oye and Nobuhiko “Nobby” Kobayashi, University of California, Santa Cruz
  • Advances in MOCVD Process and Equipment Technology Enabling Solid State Lighting, G.D. Papasouliotis and Wei Zhang, Veeco Instruments, Inc.
  • Technology and Economic Considerations for High Volume HBLED Lithography Manufacturing, Manish Ranjan, Ultratech
April – Plasma Processing for Novel Materials
  • RIE / ICP ETCHING OF SiC using PLASMA-THERM VLR-700 ETCH TOOLS, by Necmi Bilir
  • Real-Time Determination of Compositional Profiles in Structured Materials Using Laser Ablation and LA-ICPMS, Alexander A. Boľshakov, Jong H. Yoo, Jhanis J. González, and Richard E. Russo, Applied Spectra
  • Integration of Disruptive Materials for SOLAR Advanced Non-Volatile Memories, Wilbur Catabay, Telefunken
  • Introduction to Plasmas & Chemistries for Etching Novel Materials, Daniel L. Flamm, Microtechnology Law & Analysis
  • Thin Film Application in Magnetic Recording, Zheng Gao, Hitachi Global Storage Technology
  • Evolving Large Scale Quantum Computers, Travis Oh, D-Wave Systems Inc
June – 3D Packaging
  • 3D Packaging for Memory Application, Ming Li, Ph.D., Rambus
  • Considerations When Selecting A Wafer Level Bonding Process, Garrett Oakes, EV Group
  • Overview of CMP for TSV Applications, Robert L. Rhoades, Ph.D., Entrepix
  • Stress-induced Effects Caused by 3D IC TSV Packaging in Advanced Semiconductor Device Performance, V. Sukharev1, A. Kteyan1, J-H Choy1, H. Hovsepyan1, A. Markosian1, E. Zschech2, and R. Huebner2; 1Mentor Graphics Corporation, 2Fraunhofer Institute for Non-Destructive Testing
  • Cooling Three-Dimensional Integrated Circuits using Power Delivery Networks (PDNs), Hai Wei, Stanford University
November – Plasma Metrology and Applications
  • Water Based Temperature Metrology, Dinh Chu, Giampietro Bieli, Youxian Wen, GEM/SensArray
  • Evolution of RFEA Measurements at the Substrate, Hopkins, Impedan
  • The Future of Your Career and Company: Avoiding the “Kodak Moment,” David Frigstad, Frost & Sullivan
  • A CCP-Plasma Source with Operation in the High VHF to UHF Frequencies and Scalability to 450mm Substrates, A.R. Ellingboe, Dublin City University

2012

February – Technology for Clean Energy
  • A Flow Battery for Grid-Scale Energy Storage, Vincent Battaglia, Lawrence Berkeley National Laboratory
  • The Molecular Foundry at the Lawrence Berkeley National Laboratory: User Program: Statistics, Experiences, and Opportunities, David Bunzow
  • Floating c-Si Thin Films for Solar Cells, U. Cohen and M. Roitberg, UC Consulting
  • The Journey of SunPower to 20% Module Efficiency, Doug Kim, Gabriela Bunea, SunPower
  • HB-LEDs and Solid State Lighting: Challenges and Opportunities, Tom Morrow, SEMI
  • Characterization of Solar Grade Silicon Contaminants, Gary Mount, Evans Analytical Group
  • Advances in ULTIMO™ Lithium Ion Capacitor (LIC) Technology, Jim Banas & Maria Peterson, JSR Micro & JM Energy
  • Solar Technology; Crystalline Silicon PV Solar Cells, David Tanner, Applied Materials
  • Correlation of Cell Efficiency with Photoluminescence Images, Bruce True, Intevac Corp.
May Agenda – Greenhouse Gas Emissions Management and Climate Protection
  • Update on the Implementation of AB 32 Including the Cap-and-Trade Regulation, Brian Bateman, Bay Area Air Quality Management District
  • Solar in the Future Energy Mix, Paula Mints, Navigant Energy
June Agenda – 3D Packaging
  • Mechanical Stresses and Reliability Study of Cu Through-Silicon Via (TSV) Samples Fabricated by SK Hynix vs. SEMATECH using Synchrotron X-Ray Microdiffraction for 3-D Integration and Reliability, A.S. Budiman (Los Alamos National Laboratory); H.-A. Shin, B.-J. Kim, S.-H. Hwang, Y.-C. Joo (Seoul National University); H.-Y. Son, M.-S. Suh, Q.-H. Chung, K.-Y. Byun (PKG Development Group); R. Caramto, L. Smith (SEMATECH); M. Kunz, N. Tamura (Lawrence Berkeley National Laboratory)
  • Challenges and Solutions in 3DIC Extractions, Dusan Petranovic, Mentor Graphics
  • Process Integration for 2.5D/3D – A Few Steps from the Summit, Niranjan Kumar, Applied Materials
  • TSV Reveal Using Low-Selectivity CMP, Robert L. Rhoades, Paul Lenkersdorfer, and Dean Malta, Entrepix
September – Protecting Your Intellectual Property in a Changing Environment: Patent Strategies, Enforcement, & New U.S. Patent Law
  • Tortoise and Hare, Lu Yin, Ogawa
  • America Invents Act Patent Enforcement Before and After, Monroe, Christie, Parker, & Hale LLP
  • Do’s and Don’ts of Patent Enforcement: Optimizing IP Value in Trying Times, Duane Mathiowetz, Pillsbury Winthrop Shaw Pittman LLP
  • Do Sweat the Little Things, Joseph Bach, Nixon Peabody LLP

2011

February Agenda – NCCAVS Joint User Group Topical Conference on Photovoltaic Technology
  • Trends in Photovoltaics, Dr. Peter Borden, Jasper Ridge LLC
  • Kerf-Free Wafering: Technology Overview, Adam A. Brailove, Ph.D., Silicon Genesis Corporation
  • Precision Process Power and Controls for Photovoltaic Manufacturing, Randy Heckman, Advanced Energy
  • Modeling and Optimization of Silicon Solar Cells, Victor Moroz, Synopsys
  • Characterization of Contamination in PV Materials, Ian Mowat, Karol Putyera, Larry Wang, Temel Buyuklimanli and Gary Mount, Evans Analytical Group
  • The Flip Side of Technology: how plasma systems must evolve for solar PV applications, E. Ryabova, A. Skumanich, SolarVision Consulting
  • The State of the PV Industry – An Association Perspective, Karen Savala, SEMI Americas
  • For a Sunny Future, Roth & Rau
May – New Plasma Technology
  • High Power Impulse Magnetron Sputtering: A journey from early research to advanced processing, André Anders, Lawrence Berkeley National Laboratory
  • Atmospheric pressure gas plasmas for biomedical applications, Yuki Sakiyama and David Graves, Department of Chemical and Biomolecular Engineering University of California, Berkeley
  • Improving the Quality of PVD Cu seed layer for Interconnect Metallization, A. Dulkin, E. Ko, A. Dulkin, E. Ko, L. Wu, I. Karim, K. Leeser, and K.J. Park, Novellus Systems, Inc., and L. Meng, D.N. L. Meng, D.N. Ruzic, Center for Plasma Center for Plasma-Material Interactions, University of Illinois
June Agenda
  • CMP for TSV’s, Robert L. Rhoades, Ph.D., Entrepix
  • Monolithic 3D DRAM Technology, Deepak C. Sekar, Brian Cronquist, Israel Beinglass, Paul Lim, Zvi Or-Bach, MonolithIC 3D Inc. 
  • Stress-induced Effects Caused by 3D IC TSV Packaging in Advanced Semiconductor Device Performance, V. Sukharev1, A. Kteyan1, J-H Choy1, H. Hovsepyan1, A. Markosian1, E. Zschech2, and R. Huebner2; 1Mentor Graphics Corporation, 2Fraunhofer Institute for Non-Destructive Testing
July – Advanced Plasma Technology for Semiconductor, Thin Film, & Solar Processing
  • Capacitive and Inductive RF Plasma Sources for Industrial Applications, Valery Godyak, RF Plasma Consulting
  • Nanofabrication for Patterned Magnetic Media, Dan Kercher, San Jose Research Center
  • Towards Adaptive Kinetic-Fluid Simulations of Weakly Ionized Plasmas, Vladimir Kolobov and Robert Arslanbekov, CFDRC
November – Metrology for Plasma Applications
  • Mass and Energy Spectrometry of Processing Plasmas, J.A. Rees, P. Hatton, D.S. Seymour, C.L. Greenwood, and D. Lundie, Hiden Analytical
  • Retarding field analysis of the time averaged and time resolved ion energy distribution in RF and pulsed plasmas, David Gahan, Paul Scullin, Boris Dolinaj, Donal O’Sullivan and M.B. Hopkins, Plasma Research Group, Impedans Ltd
  • EtchTemp Silicon Etch (ET-SE), Giampietro Bieli, KLA Tencor
  • Geometry considerations for EEDF measurements using Langmuir probes, Steven Shannon, NCSU Nuclear Engineering

2010

February – Plasma Applications
  • ICP-RIE of Ultrananocrystalline Diamond, N. Moldovan, H. Zeng, J. A. Carlisle, Advanced Diamond Technologies, Inc.
  • Scaling Laws and Peculiarities of Micro and Macro Plasmas, Vladimir Kolobov & Robert Arslanbekov, CFDRC
  • VUV Photons and Synergistic Roughening Mechanisms of 193 nm Photoresist in Inductively Coupled Plasmas, M. J. Titus, D. Nest, T.-Y. Chung, D. B. Graves, University of California, Berkeley
  • Uniform Growth of Large Area a-Si/µc-Si Tandem Junction Thin Film Solar Cells by Capacitive Coupled PECVD, Yi Zheng, Alan Tso, Fan Yang, Rongping Wang, Tom Tanaka, Ned Hammond, Lin Zhang, Zheng Yuan and Brian Shieh, Applied Materials
April – Deposition
  • Low Temperature Deposition of PECVD Dielectric Films, Jason Taylor, SVTC Technologies Inc.
June – Career Development and Networking Workshop

July – Advances in Plasma Technology

  • Design specific variation in pattern transfer by via/contact etch process: full-chip analysis, Sukharev, Mentor Graphics
  • Plasma Activation – An Enabling Technology for Wafer Bonding, Eric F. Pabo, EV Group
  • Trends in Plasma Etching and Deposition for LED Fabrication, David Lishan, Plasma-Therm
  • Monolayer Etching with Soft Plasmas, Ed Korczynski, BetaSights
  • Insights into c-Si Processing for Photovoltaic Applications, Ismail Kashkoush and David Jimenez, Akrion Systems LLC
  • Plasma diagnostics using harmonics analysis in processing plasmas, ChinWook Chung, Hanyang University
  • Niche Market Opportunities for Small and Mid-sized Companies, Dr. Robert Castellano, The Information Network
August – Inspection and Metrology
  • Semion, Impedans
  • Specialty Techniques for Monitoring Process Temperature & Gas Concentrations: Phosphorescent Decay, Infrared Radiation, Photoacoustic Spectroscopy, Joe Sharp, LumaSense Technologies
  • Improving Etch Tool Performance Using an In Situ Gas Flow Monitoring (GFM) & Control System, Kelly McDonough, Pivotal Systems
  • Secondary electron excitation source for plasma optical emission spectroscopy diagnostics, Frank Mendoza , P.L. Stephan Thamban2, J. Hosch1, G. Padron-Wells2, A. Kueny1, K. Harvey1, M. Whelan1, M.J. Goeckner2, 1Verity Instruments, Inc., 2University of Texas at Dallas
October – Building Intellectual Property for the 21st Century
  • Building a Patent: Drafting & What Can Happen Afterward, Daniel L. Flamm, Microtechnology Law & Analysis
  • A Patent Owner’s Forum of Choice – The Rise of the International Trade Commission, Robert B. Morrill, Sidley Austin
December – Advanced Device Integration – FEOL/BEOL
  • Process Technology Explosion: New Frontiers at Intersections of Semiconductor and Related Technologies, Brian Goodlin, Texas Instruments
  • Developing a robust conditioning system in 300mm CuCMP – Better Ways to Build Better Wafers, John Zabasajja, Michael Pevny, Tammy Engfer and Doug Pysher, 3M Electronics
  • FDSOI Metal Gate Transistors for Ultra Low Power Subthreshold Operation, S. A. Vitale, J. Kedzierski, P. W. Wyatt, M. Renzi, C. L. Keast, MIT Lincoln Laboratory

2009

February – MEMS Applications and Processing
June – BEOL Dielectric Etching
August – Instrumentation and Metrology for Plasma Processing
  • Mid Infrared Absorption Spectroscopy System for Plasma Monitoring, Q-MACS Team, Neoplascontrol
  • Chemical and Remote Plasma Clean Impedance Endpoint Detection, Turner, Forth-Rite Technologies LLC
  • Electrical Non-contact Characterization of Plasma Processing Induced Damage on Blanket Oxides and Patterned Low-k Dielectrics, Laurent Kitzinger, Andrew Findlay, John D’Amico, Nikos Jaeger, Vladimir Talanov, Semilab
October – Plasma-Assisted Surface Modification Processes

2008

March – Front End Plasma Etch Applications
  • Shrink and Control Critical Dimension Using Dielectric Etch Chamber for 45nm Technology and Beyond, Judy Wang, Shing-Li Sung, Zhifeng Sui, Eda Tencel, Ajey Joshi, Peter Hsieh, Shawming Ma, Jingbao Liu, Subhash Deshmukh, Applied Materials
  • Striation Free Etch Technology, Fujino, Philtech Inc.
May – Greenhouse Gas Reduction Efforts in the Semiconductor Industry
  • Fluorine : Optimised and sustainable cleaning agent for CVD processes, Shuttleworth, The Linde Group
  • Greenhouse Gas Reduction and Energy Efficiency – Opportunities for Equipment Suppliers, Stanley Hughes, Applied Materials
June – Backend Dual Damascene Etch
  • In-Situ Measurement of the Relative Thermal Contributions of Chemical Reactions and Ions During Plasma Etching, M.R. Tesauro (Qimonda Dresden GmbH & Co.), G.A. Roche (KLA-Tencor)
August – Plasma Etch Related Metrology and Diagnostics
  • SD1024FH Super High Performance Imaging Spectrometer Imaging Spectrometer With SD1024FL Appendix, Mendoza, Verity Instruments, Inc.
  • Precision Wireless Metrology Applications for Improved Productivity and Process Control, Hannaford, WaferSense™ CyberOptics Semiconductor, Inc. 
  • Microplasma Optical Emission Sensors for Process Chemistry Analysis, Chris Doughty, Verionix, Incorporated
September –
  • New Applications for Optical Emission Spectroscopy, Powell, Litvak, Lightwind OES Solutions
  • …rethink your Metrology, Cunnane, Metryx
December – Advanced BEOL Integration

2007

May – BEOL Dielectric Etching
  • Wafer Based Diagnostic for Dielectric Etching Plasmas, Greg Roche, Paul Arleo, Paul MacDonald, KT Promesys, KLA-Tencor
  • Ion Beam Interactions with Advanced Photoresist Polymers, D.G. Nest, M. Goldman, D.B. Graves (University of California, Berkeley); S. Engelmann, R.L. Bruce, B.F. Smith, T. Kwon, R. Phaneuf, G.S. Oehrlein (University of Maryland, College Park); C. Andes (Rohm and Haas Electronic Materials); E.A. Hudson (Lam Research Corp.); P. Lazzeri and M. Anderle (ITC-Irst)
  • Tutorial on Using RF to Control DC Bias, Jim McVittie, Stanford University
  • New Challenges in Etching Ultra Low-k Dielectrics, A. Li, K. Zhou, Y. Zhou, R. Cheung, S. Parikh and M. Armacost, Applied Materials
November – Intellectual Property in Nano & Semiconductor Technology
  • The Process of Creating Patented Inventions, Daniel L. Flamm, Buchanan, Ingersoll & Rooney LLP
  • Intellectual Property and Counterfeits in China, Joseph Bach, Sughrue Mion PLLC
December

2006

January –
  • In-band Spurs for a V-I probe caused by multi-frequency plasma effect, Yufeng Han, Aaron Radomski,Yogi Chawla and Brent Irvine, MKS
  • Dual Frequency Dry Etching for Dual Frequency Dry Etching for Advanced Memory Applications Advanced Memory Applications, Robert Ditizio, Tegal Corporation
March –
  • Synergistic Effects of Gas Mixtures in a transformer-coupled toroidal plasma source for remote chamber cleaning, Herb Sawin, MIT Plasma Processing Group
May –
  • Study and Reduction of Plasma Damage of Porous Ultra Low-k Dielectrics during Photoresist Stripping, Songlin Xu, Mattson
  • Effect of Species Density and Ion Scattering During Ashing on Ultra Low-κ Inter-Level-Dielectric (ILD) Materials, M.A. Worsley, S.F. Bent (Stanford University); N.C.M. Fuller,  J. Doyle, M. Rothwell, T.J. Dalton (IBM Research Division); T.L. Tai (Hopewell Junction)
  • Surface Texturing of 193 nm Photoresist under Ar+ Bombardment: Effect of Ion Energy, Angle of Incidence and Substrate Temperature, D. Nest, E. Pargon and D. Graves (University of California, Berkeley); S. Engelmann and G. S. Oehrlein (University of Maryland); C. Andes (Rohm and Haas Electronic Materials); E. A. Hudson (Lam Research Corp)
  • The Transition from Saturated (c-C4F8) to Unsaturated (1,3-C4F6) Perfluorocarbons: Effects on Selectivity and ARDE in Via-hole Plasma Etch Applications, Teressa L. Anglinmatumona, Intel Corporation
July –
  • Integrated CD Shrink Methodologies for Contact Etch, Scott Allen, Rich Wise, and Nikki Edleman (IBM); Judy Wang, Melody Chang, Shawming Ma, and Kang-lie Chiang (Applied Materials); TjinTjin Tjoa (Hopewell Junction)
  • Control of Contact Hole Distortion by Using Polymer Deposition Process (PDP) for sub-65nm Technology and Beyond, Judy Wang, Applied Materials
  • Etch Processes for Nano-scale Vertical MOS Devices, Hoon Cho, Pawan Kapur and Krishna C. Saraswat, Stanford University
October –
  • MEMS Development at Maxim Using STS VPX, Yaqiang Wang, Quanbo Zou, Dino Lei, Uppili Sridhar, and Tito Chowdhury, Dallas Semiconductor-Maxim
  • Enabling DRIE processes for high potential MEMS products, Michel Puech, Alcatel 
  • Optical MEMS platform for low cost on-chip integration of planar light circuits and optical switching, J. Kubby, UC Santa Cruz

2005

January –
  • Lithographically Generated Line Edge Roughness in Photoresist, Adam R. Pawloski, Alden Acheta, Bruno La Fontaine, Scott Bell, Harry J. Levinson, Advanced Micro Devices
  • Line Edge Roughness Reduction at the 90nm Technology Node for Contact and Trench Etched Features, David Farber, Bill Dostalik, Brian Goodlin, Robert Kraft, Tom Lii, Texas Instruments
  • Line Edge Roughness Reduction for Advanced Metal Gate Etch with 193nm Lithography in a Silicon Decoupled Plasma Source Etcher (DPSII), Tito Chowdhury, Hean-Cheal Lee, A Renaldo, K Ikeuchi, B Bruggermann (Cypress Semiconductor R&D); Yan Du, Meihua Shen, Jinhan Choi, and Shashank Deshmukh (Applied Materials)
  • Roughness Metrology The next Dimension, Yogev Barak, Applied Materials
March –
  • Effects of Dual Bias Frequency on SiO2 Contact Hole Etching in Very High Frequency Fluorocarbon Plasmas, Wonseok Lee, Shawming Ma, Jang Gyoo Yang, Daniel Hoffman and Yan Ye, Applied Materials
April –
  • Automated CD-SEM Recipe Generation Utilizing Design Pattern Layout, Brandon Ward, Lorena Page, Hitachi High Technologies America, Inc.
June –
  • The control of Electrode Impedance, GasInjection and Wafer-Temperature Radial Profile and their Effects on Poly-Gate Etching, Lee Chen, Yuji Tsukamoto, Fumihiko Higuchi, and Masaaki Hagihara (Tokyo Electron Massachusetts, LLC); Yohei Yamazawa (Tokyo Electron AT.LTD ); Tetsuya Tatsumi, and Atsushi Kawashima (Sony Corporation)
  • Unraveling the Complex Processes in a Fluorocarbon Plasma, Matthew Goeckner, University of Texas at Dallas
July –
  • A 300mm test wafer to evaluate charging damage, Fumio Otoi, Yuji Furumura, Philtech Inc.
  • Minimizing Plasma-Induced Charging Damage during Multi-Step Etching of Dual-Damascene Trench and Via Structures with Process Optimization, M. Kutney, S. Ma, D. Buchberger, A. Zhao, G. Delgadino, D. Hoffman, and K. Horioka, Applied Materials
September –
  • Chamber Wall Effects on Polycrystalline-Si Reactive Ion Etching in Cl2: A Multiple RealTime Sensors Study, Fred L. Terry, Jr., University of Michigan
  • Consumables Erosion and Temperature Effects on Dielectric Etch Rates, Russell Ethridge, Tim Nguyen, Steve Lum, Tito Chowdhury, David Muise, Dallas Semiconductor
December

2004

February –
  • In-Situ Production Process Detection and Chamber Matching Using Temperature Metrology Sensors and Diagnostics, Paul MacDonald, OnWafer Technologies
March –
  • Self-aligned Contact Etch Development for 90 nm Technology Node, Mehran Sedigh, Jie Zhang, and Harry Lee (Cypress Semiconductor); James Stinnett, and Ajey Joshi (Applied Materials)
  • Advance Gate CD Control by Gate Dielectric Hard Mask Open Process Optimization, Gerardo Delgadino, Yasush Takakura, Shawming Ma, and Yan Ye, Applied Materials
  • Deposition and Patterning of Zirconium and Hafnium Oxide as High-k Gate Dielectrics, Jane P. Chang, University of California, Los Angeles
April –
  • Multivarible vs. Univariable APC, Kamyar Faron, Mark Freeland, Ole Krogh, Sukesh Patel, and Gayathri Raghavendra, Blue Control Technologies
May –
  • Integrated Dual Damascene Etching for 65nm Technology and Beyond, Yan Ye, Ph.D., Applied Materials
  • Dual Damascene Etch; Challenges at the 65nm Node and Beyond, Makarem Hussein, Intel Corporation
  • Repairing Process-Induced Damage to Porous Low-k ILDs by Post-Ash Treatment, Anil Bhanap, Teresa Ramos, Anna Camarena and Ananth Naman, Honeywell Electronic Materials
July –
  • Chamber Pressure Control, Martin Tollner, BOC Edwards (UK)
  • “Electron Shading”: Inevitable … or Not ?, Wes Lukaszek, Wafer Charging Monitors, Inc.
  • Plasma Induced Charging Damage: From An Semiconductor Equipment Vendor Point of View, Shawming Ma, Applied Materials
August –
  • RF Metrology – Tools and Process Capability, Philip Schmitt, and Mark Rousavy, MKS Confidential
  • Component Health Monitoring and Diagnostics in Plasma Etch Chambers using In-Situ Temperature Metrology, Paul MacDonald, and Michiel Krüger, OnWafer Technologies, Inc.
September –
  • Deep Reactive Ion Etch Process Development for MEMS Rotary Engine Power System, Ning Chen, University of California, Berkeley
  • MEMS Etching Technology, T.-K. Allen Chou, Intel Corp.
December

2003

January –
  • Line Edge Roughness Reduction for Advanced Metal Gate Etch with 193nm Lithography in a Silicon Decoupled Plasma Source Etcher (DPS II), T. Chowdhury, H. Lee, R. Khen, and H. Bamnolker (Cypress Semiconductor); Y. Du, M. Shen, S. Deshmukh, and J. Choi (Silicon Etch)
  • Plasma Etching of Cobalt Silicide, S. Marks, and G. Beique, Tegal Corporation
March –
  • PFC’s in a Baker’s Dozen -a Retrospective on the Technical and Non-Technological Issues, Mike Mocella, DuPont Electronic Gases
  • Exhaust Management of Etch Processes, Joe Van Gompel, BOC Edwards
  • Semiconductor Manufacturers Leading the Way for Climate Protection, Scott C. Bartos, U .S. Environmental Protection Agency
April –
  • Measuring and Minimizing Line Edge Roughness in BEOL Damascene Dielectric Patterning, Calvin Gabriel, Bryan Choo, Carmen Morales, and Bhanwar Singh, AMD
May –
  • Improved Control of Chamber condition through new Waferless Auto Clean, S. Ullal, S. Gangadharan, E. Edelberg, J. Daughtery, H. Singh, and V. Vahedi (Lam Research Corporation); A. Godfrey, and E. Aydil (University of California, Santa Barbara)
  • Modeling and Diagnostics Studies of Si Plasma Etch and Etch By-Products, David B. Graves, University of California, Berkeley
June –
  • Manufacturing Qualification of Plasma Wafer Cleaning Processes for FEOL and BEOL Applications, Han Xu, ULVAC Technologies, Inc
  • The Effect of Ash Processes on Inorganic Porous Low-k Materials, Lei Jin, Anil Bhanap, Anna Camarena, Ananth Naman, Honeywell Electronic Materials
  • Photo resist Strip Capabilities at 90nm and below, J. Devrajan, Ph.D, Novellus
August –
  • The Chip Insider’s Graphics File, VLSI Research Inc.
  • The Dark Side of Moore’s Law: Threats and Opportunities in an Era of Rapid Technology Commoditization, Mitchell Halpern Ph.D., SRI Consulting
  • Trade Secrets: The Fundamental IP Right, James Pooley, Milbank, Tweed, Hadley & McCloy
September –
  • A Highly Symmetrical Capacitively Coupled High Density Plasma Reactor with Agile Wafer Heating for Ferroelectric Stack Etch, Geneviève Béïque, Steven Marks, John Almerico, Paul Werbaneth, Tegal
  • New ICP Technology for Semiconductor Material Processing, V. A. Godyak, RF Plasma Consulting
October –
  • Patterning Magnetic Recording Media by Patterning Magnetic Recording Media by Deposition on Imprinted, Etched, Pillars, Gary McClelland, Mark Hart, Charles Rettner, and M. Sanchez (IBM Research Division); Margaret Best, Bruce Terris, and Manfred Albrecht (Hitachi San Jose Research Center)
  • Turning the Evil into Good: Plasma Synthesis of Silicon Nanoparticles and Potential Applications, U. Kortshagen, University of Minnesota
  • Plasma Aided CVD of Carbon Nanotubes, Brett A. Cruden, NASA Ames Research Center
  • Plasma Diagnostics for Nanoscale Fabrication, Alexander A. Boľshakov, Brett A. Cruden, Surendra P. Sharma, NASA Ames Research Center
December –
  • Integration of Modeling and Simulation into Process Development, P.L.G. Ventzek, S. Rauf, P.J. Stout, Motorola and Digital DNA
  • Modeling in FaST Division, G. Janik, KLA-Tencor
  • Gas Surface Interaction Modeling for Carbon Nanotube Deposition, D. B. Hash, T.R. Govindon, and M. Meyyappan (NASA Ames Research Center); D. Bose, B. Cruden (ELORET Corp.); K.B.K. Teo, R.G. Lacerda, N.L. Rupesinghe, G.A.J. Amaratunga, W.I. Milne (University of Cambridge)

2002

January –
  • Sidewall Passivation Mechanism of CHxFy Added Polysilicon Gate Etch Processes, Th. Lill, F. Ameri, S. Deshmukh, Songlin Xu, D. Podlesnik, and J. Holland (Applied Materials); L. Vallier, O. and Joubert (CNRS/LTM)
  • Integrated CD Metrology for Poly Si Etching, G.P. Kota, V.Venugopal and R.A. Gottscho (Lam Research Corporation); T.G. Dziura, U.Whitney and A. Levy (KLA-Tencor)
  • Sub 0.1um Gate Etch Challenges for Memory Applications, T. Chowdhury, K. Ikeuchi, Cypress Semiconductor
April –
  • Etching on SiLK an Organic Low-k Material, Cecilia Quinteros, Ph.D., Helen Zhu, LAM Research 
  • In-Situ Etch Depth Monitoring for Low-± Damascene Trench Etch, Dimitris Lymberopoulos, Ph.D, Applied Materials
May
June Agenda –
  • Tapered Trenches for Microelectromechanical Systems, M. Rattner, B. Cooper, R. Guenther, J. Chinn, AKT/Applied Materials
  • Optimization of Deep Hole Etching in Silicon for 3-D X-ray Detectors, E. Peroziello, J. Hasi, S. Parker, C. Kenney, S. Beckwith, N. Latta, Stanford University
  • Impact of SiOC Low K Materials on Dual Damascene Patterning, Gary Ray, Ph.D (Novellus Systems Inc.); Steve Lassig (LAM Research, Inc.)
  • Plasma Etching for Optical MEMS: Scanning Micromirrors Based on Self-Aligned Vertical Combdrive Actuators, Stefan Zappe, Uma Krishnamoorthy, Daesung Lee and Olav Solgaard, Stanford Microphotonics Laboratory
August –
  • What Goes on Behind Open Doors: Fabrication Capabilities at UC Berkeley Microfabrication Laboratory, Tsu-Jae King, Katalin Voros, Dr. Bill Flounders, University of California, Berkeley and Berkeley Sensor and Actuator Center
October –
  • Material Issues and Impact on Reliability of Cu/Low k Interconnects, Paul S. Ho, University of Texas at Austin
  • Etch Challenges in Low k Integration, Raymond Hung, Process Module Group 
December –
  • The PE-ALD of Ta Based Metals/Nitrides: The Growth, Materials ALD of Ta Based Metals/Nitrides: The Growth, Materials Properties, and Applications Properties, and Applications to Future Device Fabrications, Hyungjun Kim and Steve M. Rossnagel, IBM Research Center
  • Fundamental Vacuum Beam Studies of Radical Enhanced Atomic Layer Chemical Vapor Deposition (REAL-CVD) of TiN, Dr. Frank Greer,Dr. D. Fraser, Dr. J.W. Coburn, and Professor David B. Graves, University of California, Berkeley

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