Chemical Mechanical Polishing Users Group (CMP)
Chemical Mechanical Polishing (CMP) is a technology used for planarization and surface finishing in the manufacture of silicon wafers, integrated circuits (IC’s), magnetic heads and micro-electromechanical devices (MEMS). CMP is recognized as the premiere method for achieving ultraflat and ultrasmooth surfaces when they are most critical, thus enabling many of the advanced electronic devices currently in production. At various steps in the process flow, surface bumps or topography from the underlying layers can cause yield-limiting problems for the next process step. CMP was developed specifically to address these issues. Since its mainstream introduction in the mid-1990’s, applications have continued to grow rapidly in both volume and complexity. None of the advanced microprocessor or memory circuits manufactured today would be possible in their current form without multiple CMP process steps. Newer technologies, such as 3D packaging and thru-silicon vias, also continue to leverage CMP for its unique planarization capabilities.
The CMP Users Group (CMPUG) was formed in October 1995 to explore the issues and challenges associated with this fast growing technology. The CMPUG’s main activity is a quarterly meeting with technical presentations on a topic of interest to the CMP community.
Admission to the quarterly technical meetings and membership in the CMPUG is FREE and open to anyone involved or interested in joining the CMP Users Group, including those in device and equipment manufacturing, academia, or consulting.
The CMPUG is a charter co-sponsor of the International Conference on Planarization/CMP Technology (ICPT) which is held every fall in the October/November timeframe. ICPT is hosted on a rotating basis among the five international CMP Users Groups in Europe, Japan, Korea, Taiwan, and USA. ICPT ’06 was held in the Foster City, CA USA, ICPT ’07 was held in Dresden, Germany, ICPT ’08 was hosted by the Taiwanese User Group in Hsinchu, Taiwan, ICPT ’09 was held in Fukuoka, Japan and ICPT ’10 was held in Phoenix, AZ USA. The next ICPT is being planned in Seoul, Korea, November 9-11, 2011 and will return the Europe in 2012.