ABSTRACT SUBMISSION DEADLINE: October 30, 2026
MEETING DATE: December 10, 2026 (Virtual Meeting)
TIME: 8:00 p.m.-5:00 p.m. (Pacific Time) – check your time zone
PLATFORM: Google Meet
REGISTER: Free to Attend – Advance Registration Required
(Google Meet login details will be provided December 9, 2026, one day prior to the event)
CO-CHAIRS:
Richard Vreeland, Intel, Richard.F.Vreeland@intel.com
Kevin Dockery, Entegris, Kevin.Dockery@entegris.com
Leticia Vazques Bengochea, Micron, lvazquezbeng@micron.com
CALL FOR ABSTRACTS
We are now accepting abstracts for the Chemical Mechanical Planarization Users Group (CMPUG) Winter Symposium, a fully virtual conference scheduled for Thursday, December 10, 2026. We welcome submissions on CMP, post-CMP cleans, and related upstream and downstream technologies. This year, we are also allocating a few speaker slots to highlight work relating to packaging technology, 3DIC, hybrid bonding, and related topics.
The symposium serves as an international forum for academic researchers, industrial practitioners, and engineers from around the world for the exchange of information on state-of-the-art research in CMP and post-CMP cleans in the semiconductor, MEMS, and nanotechnology industries. The CMP User Group fosters the exchange of opportunities, ideas, friendly relationships, and research collaboration.
Key areas of focus for this meeting include:
- CMP and Post-CMP Fundamental understanding
- CMP and Post-CMP Consumables and Materials
- CMP and Post-CMP Polishing and Metrology Tools
- CMP and Post-CMP Process Integration
Abstract/Presentation Submissions
- Please submit an abstract (using the abstract submission template) of your presentation no later than Friday October 30, 2026, to the meeting Co-Chairs: Richard, Kevin, and Leticia.
- Authors will be notified of acceptance by return e-mail
- This is an all-virtual event therefore, all accepted presenters are required to submit their presentations in pdf or pptx format, approved by their respective organizations/employers for public release, by November 23, 2026
- All presentations will be posted on the CMPUG Proceedings webpage within 2 weeks following the meeting.
All presentations from this meeting will be posted on the CMPUG Proceedings webpage ~2 weeks following the meeting.
Platinum Sponsors
Gold Sponsors
Sponsorship
If you would like to sponsor a 2026* User Group (CMPUG, JTG, PAG, or TFUG) meeting, click the “BE A SPONSOR” button.
*2026 CMPUG Schedule is posted