CO-CHAIRS:
Scott Lawing, Kinik North America, slawing@kinikna.com
Jeff McKinnis, Fujimi Corporation, jmckinnis@fujimico.com
AGENDA
1:00 Welcome and Acknowledgment of sponsors; by conference co-chairs Scott Lawing (Kinik North America) and Jeff McKinnis (Fujimi Corporation)
1:10 Bringing Value to the Customer with Big Data, Andrea Oehler, PhD (Fujimi Corporation)
1:35 Exploiting Fluorescence for Enhanced Nanoparticle Tracking Analysis of CMP slurries, Dr. Jeff Bodycomb and Carl Lundstedt (Horiba Scientific)
2:00 Modulating Interfacial Reactions to Develop “Soft” p-CMP Processes, Abigail L. Dudek, Kiana A. Cahue, Tatiana R. Cahue, Mantas M. Miliauskas, and Jason J. Keleher (Lewis University)
2:25 Announcements
2:35 Advanced Point of Dispense Filtration for Recirculating Systems, Bradley Wood, (Entegris)
3:00 Applications of AI, Machine Learning and Big Data in Chemical Mechanical Polishing, Scott Lawing (Kinik North America)
3:25 CMP Knowledge Foundry and Big Data Analytics, A. Philipossian, N. Monfared , Y. Sampurno (Araca, Inc), and J. J. Keleher (Lewis University)
All presentations will be posted on the CMPUG Proceedings webpage within 1-2 weeks following the meeting.
MEETING DATE: February 17, 2022
TIME: 9:00 a.m. – 5:00 p.m. (PST) TIMEZONE CONVERTER
LOCATION: Fremont Marriott Silicon Valley
46100 Landing Pkwy.
Fremont, CA 94538
FREE TO ATTEND – Registration Coming Soon
