CMPUG Spring Meeting – Call for Papers
Date, Time & Location:
April 11, 2019
Times: 1:00-6:00 p.m. (Check-in @ 12:30 p.m./Dinner following the meeting)
Micron Technology Boise (Idaho)
8000 S. Federal Way, BLDG. 17
Boise, ID 83707
PARKING: Available in Building 17C parking lot. Directions and more detailed information below
MICRON SITE MAP
MICRON PARKING MAP
FREE ONLINE REGISTRATION*
*Advance registration required for security approval
REGISTER HERE
Platinum Sponsors
Gold Sponsors
Ferro Corp.
Kinik Company
Levitronix
Co-Chairs:
Michael Pevny, 3M, mpevny@mmm.com
Andrew Carswell, Micron Technology, acarswell@micron.com
SPEAKERS/AGENDA
12:30 pm – Registration/Badge Pick up at Bldg 17 lobby entrance
1:00 pm – Welcome and Acknowledgment of sponsors by Co-Chairs Mike Pevny (3M) and Andrew Carswell (Micron Technology)
1:10 pm – Keynote Talk, Suresh Ramarajan, Senior Director NVM Process Development Engineering, Micron Technology
1:40 pm – “Method for Studying the Effect of Conditioner Design and Polisher Kinematics on Fluid Flow Characteristics during CMP”, Juan Cristobal Mariscal, University of Arizona
2:05 pm – “Low Particle Size Ceria STI Slurry Designed for High Performance Dishing and Nitride Loss”, Edmund Chu, Ferro
2:30 pm – “The Development of Post-CMP Cleans to Address New Challenges in Advanced Device Manufacturing”, Paul Bernatis, DuPont EKC Technology
2:55 pm – Coffee Break/Poster Session/Networking
3:40 pm – “Effect of Conditioner Wear on the Tribological, Thermal, Kinetic and Pad Microtextural Characteristics in ILD CMP”, Hossein Dadashazar, University of Arizona
4:05 pm – “Computer Simulation for Understanding of CMP Process”, Akira Endou, Fujimi Incorporated
4:30 pm – “High Quality Test Wafer and Analysis For CMP Process, Consumables and Materials”, Yasuji Moriki, AMT
4:55 pm – “Okamoto 300mm Final Polish System”, Bob Pinto, Okomoto
5:20 pm – ICPT and CAMP Announcement, Sponsor Announcement
5:30 pm – Concluding remarks by Co-Chairs Michael Pevny and Andrew Carswell
5:40 pm – Meeting Adjourn
6:30 pm – Gratis Dinner Located at El Tanampa Mexican Restaurant, 7802 W. Spectrum St., Boise
All presentations will be posted on the CMPUG Proceedings webpage within 2 weeks following the meeting.
- If you would like to sponsor this meeting or list a banner ad on the User Group website, please check out our “NCCAVS Marketing/Sponsorship” opportunities at: https://nccavs-usergroups.avs.org/wp-content/uploads/2017/08/UG-Sponsor.pdf
Hotel Information
- The Grove Hotel – http://www.grovehotelboise.com
- Hotel 43 – http://www.hotel43.com
- Inn at 500 Capitol – https://www.innat500.com
- Residence Inn by Marriott – https://www.marriott.com/hotels/travel/boird-residence-inn-boise-downtown-city-center/
- Hampton Inn and Suites – https://www.guestreservations.com/hampton-inn-suites-boise-downtown/booking?msclkid=8185e042a87d168d201fbc3b63823263