MEETING DATE: December 3, 2025 (Changed to 1 half-day event)
TIME: 8:30 a.m.-1:00 p.m. (Pacific Time) – check your time zone
PLATFORM: ZOOM
VIRTUAL MEETING | Free to Attend – Advance Registration Required
(Zoom login details will be provided upon registering)
CO-CHAIRS:
Nagella Nakuna, Dupont Electronics, nagella.nukuna@dupont.com
Katrina Mikhaylich, Applied Materials, Ekaterina_Mikhaylichenko@amat.com
Richard Vreeland, Intel, richard.f.vreeland@intel.com
2025/12/03 13:00:00
AGENDA
SESSION ONE – Richard Vreeland, Session Chair
8:30 AM – Introductory Remarks
Richard Vreeland / Bob Roberts, Intel Corporation / Kothar Technologies
8:40 AM – “Chemical Mechanical Planarization (CMP): The Foundational Importance in Advancement of the Semiconductor Industry”, Matt Prince, Independent Consultant
9:15 AM – “Hybrid Bonding Hotspots Prediction At Wafer Scale Using ML-Based CMP Simulations”, Ruben Ghulghazaryan, Siemens EDA, CEA-LETI
9:40 AM – “Modeling and Simulation on 3M Chemical-Mechanical Planarization Products”, Jiadi Fan, 3M Company
SESSION TWO – Bahar Basim, Session Chair
10:05 AM – “Analysis of Slurry Flow Distribution and Coverage Uniformity over CMP Pads Using VOF Modeling”, Atefeh Sadrimofakham, Clarkson University
10:30 AM – “Ontology-Enabled CMP Digital Twin: Integrating Process, Consumable, and Batch Intelligence to Accelerate Development”, Wei Zhao, Athinia Technologies LLC
10:55 AM – “Effluent Slurry Extraction and Analysis during Cu, ILD and Mo CMP During In-Situ Conditioning with Various Types of Gritted Diamond Discs”, Ara Philipposian, Araca, Inc., Lewis University
11:20 AM – Break Time (15 mins)
SESSION THREE – Katrina Mikhaylichenko, Session Chair
11:35 AM – “A Framework for Sustainable Ceria Nanoparticle Synthesis: Integrating AI Agents, Text Mining and Life Cycle Assessment for CMP Applications”, Ravitej Venkataswamy, Clarkson University
12:00 PM – “A Perspective in Workforce Development in CMP: Challenges and Path Forward”, Bahar Basim
12:25 PM – “Guided by Experience, Powered by AI: Building Semiconductor Careers through Mentorship”, Tricia Burroughs, GlobalFoundries
12:50 PM – Closing Remarks
Richard Vreeland, Intel Corporation
Presentation Submissions
- This is an all-virtual event therefore, all accepted presenters are required to submit their presentations in pdf or pptx format, approved by their respective organizations/employers for public release, by December 1, 2025.
All presentations from this meeting will be posted on the CMPUG Proceedings webpage ~2 weeks following the meeting.
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Sponsorship
If you would like to sponsor a 2026* User Group (CMPUG, JTG, PAG, or TFUG) meeting, click the “BE A SPONSOR” button.
*2025 CMPUG Schedule is posted, 2026 is TBD
NCCAVS 46th Annual Equipment Exhibition | Technical Symposium & Workshop/Tutorial |13th Annual Student Poster Session
DATE: February 26, 2026
TIME: 9:00 a.m.-6:00 p.m. (Pacific Time) – check your time zone
LOCATION:
Fremont Marriott Silicon Valley
41600 Landing Pkwy.
Fremont, CA 94538
Free to Attend – Conference Registration Coming Soon
OPEN NOW! Register to Sponsorhip/Exhibit Online
2026/02/26 09:00:00
The Northern California Chapter AVS – NCCAVS 46th Annual Equipment Exhibition will be held in conjunction with the NCCAVS Technical Symposium & Workshop/Tutorial and 13th Annual Student Poster Session.
The Exhibition showcases products and services of companies supporting vacuum-related industries. The theme of the Symposium is “Engineering Matter One Layer at a Time: The Science of Atomic Scale Processing.” The symposium will provide an international forum for academic researchers, industrial practitioners and engineers from around the world for the exchange of information on state-of-the-art research and include a workshop with speakers from academia and industry focusing on Atomic Layer Deposition and Atomic Layer Etching. There will also be a Student Poster Session to round out this annual event. Some highlights include:
- Largest Attendance of any AVS Chapter or Division
- Workshops from industry subject matter experts
- Speaker events at capacity
- Opportunities to speak with aspiring professionals during the Student Poster Session
- Extended hours provide ample time to engage all attendees
- Lunch, evening reception, and cocktails provided at no cost to attendees
For more information please visit the NCCAVS Website.