CMPUG Announcements

The Northern California Chapter of the American Vacuum Society invites you to participate in a Joint User Group Meeting on Wednesday, September 10, 2025. The meeting is being organized by NCCAVS via ZOOM and is jointly hosted by the CMP Users Group, the Plasma Applications Group, and the Thin Film Users Group.

AGENDA (All times are Pacific Daylight Time)

12:30 p.m. Welcome and Acknowledgement of Meeting Sponsors, Co-Chairs: Rob Rhoades, Lucia Feng, Michael Oye

12:35 p.m. Oreste Donzella, Senior Advisor and Board Member, Former C-Suite Executive,“Enabling Semiconductor Technology Roadmap via Advanced Packaging in the AI Era”

1:10 p.m. Catharina Rudolph, Fraunhofer IZM, “CMP in Heterogeneous Integration – Advanced Packaging”

1:45 p.m. Adjourn

All presentations may be posted on the CMPUG, PAG and TFUG Proceedings webpages within 2 weeks following the meeting if presenters make them available for posting.

Platinum Sponsors

Gold Sponsors

We are now accepting abstracts for the Chemical Mechanical Planarization Users Group (CMPUG) Winter Symposium. We welcome submissions on CMP, post-CMP cleans, and related upstream and downstream technologies. This year, we are also allocating a few speaker slots to highlight work at the interface of AI/ML (Artificial Intelligence / Machine Learning) and CMP/post-CMP cleans.

The symposium serves as an international forum for academic researchers, industrial practitioners, and engineers from around the world for the exchange of information on state-of-the-art research in CMP and post-CMP cleans in the semiconductor, MEMS, and nanotechnology industries.  The CMP User Group fosters the exchange of opportunities, ideas, friendly relationships, and research collaboration.

Key areas of focus for this meeting include:

• CMP and Post-CMP Consumables and Materials
• CMP and Post-CMP Polishing and Metrology Tools
• CMP and Post-CMP Process Integration
• Work at the interface of AI/ML and CMP / Post-CMP cleans

Abstract/Presentation Submissions

• Please submit an abstract (using the abstract submission template) of your presentation no later than Friday October 31, 2025, to the meeting Co-Chairs, Nagella, Katrina, and Richard
• Authors will be notified of acceptance by return e-mail
• This is an all-virtual event therefore, all accepted presenters are required to submit their presentations in pdf or pptx format, approved by their respective organizations/employers for public release, by November 20, 2025
• All presentations will be posted on the CMPUG Proceedings webpage within 2 weeks following the meeting.